This Proceedings contains the papers presented at the third International Symposium on "Electrochemical Microsystem Technologies", held in Garmisch-Partenkirchen, on 11-15 September 2000. The papers in this Special Issue are based on the 90 presentations given. In all, 45 papers were accepted, covering many diverse topics, demonstrating the many advances throughout. Due to their emphasis on different fields, they are arranged as follows: Introduction and Fundamentals, Microgalvanics and Microstructuring, Micromaterials and Surface Analysis, Corrosion/Surface Modification, Microanalysis and Applications in Biology, and Nanoelectrochemistry.