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The book deals with the main issues of reflective ellipsometry, in particular, the relationship between the characteristics of a reflective system and the polarisation parameters of the reflected medium - single-layer, two-layer and anisotropic media. The basics of the photometric ellipsometry method, the algorithm for calculating system parameters from measured values of ellipsometric data, and the basics of ellipsometric methods for controlling optical parts subjected to various surface treatments are considered. The results of ellipsometric studies of dielectric coatings, ionically implanted semiconductors, processes of interaction of atmospheric air with the surface, etc. are presented. The book is intended for scientists and engineers who use ellipsometric instruments in their research, teachers and students of higher education institutions.