Microsystems for Bioelectronics: Scaling and Performance Limits considers physical principles and trends in extremely scaled autonomous microsystems such as integrated intelligent sensor systems, with a focus on energy minimization. The book explores the implications of energy minimization on device and system architecture. It further details the behavior of electronic components and the further implications on system-level scaling and performance limits. In particular, fundamental scaling limits for energy sourcing, sensing, memory, computation, and communication subsystems are developed, with new applications such as optical, magnetic, and mechanical sensors presented. This fully revised and updated edition includes information on semiconductor memories, betavoltaic energy conversion, advanced packaging, recent technology trends, and new technology roadmaps. This new edition of this well-proven book with its unique focus and interdisciplinary approach shows the complexities of the next generation of nanoelectronic microsystems in a clear and easy-to-understand manner, and is aimed for a broad audience within several disciplines.