Characterization of Radiation Damage by Transmission Electron Microscopy details the electron microscopy methods used to investigate complex and fine-scale microstructures, such as those produced by fast-particle irradiation of metals or ion implantation of semiconductors. The book focuses on the methods used to characterize small point-defect clusters, such as dislocation loops, because the coverage in general microscopy textbooks is limited and omits many of the problems associated with the analysis of these defects. The book also describes in situ, high-resolution, and analytical techniques. Techniques are illustrated with examples, providing a solid overview of the contribution of TEM to radiation damage mechanisms. The book is most useful to researchers in, or entering into, the field of defect analysis in materials.